Duct Works include new structure works
● To erect new structure out of existing building
● For new cleanroom MA / Exhaust riser
● Height : 28m
● Design, Calculation, & BCA submission
● Façade works
● Ducting insulation
● Maintenance platform and access
VOC (Volatile Organic Compounds) Abatement System
● Design and Install new VOC abatement System for GF Solvent Exhaust
● System Capacity: 60,000CMH x 2 sets
● VOC Abatement Equipment include: Rotor, Oxidizer, 2nd Fan & Desorb Fan
● Mechanical works include: SS304 Exh Duct, SOX Fan, ROR, N
● Utilities supply works include: ROR, Drainage, Natural Gas, N2, CDA, Power…etc
● Electrical works include: VSD, wiring and power
● I&C works include: temperature, pressure, system operating status monitoring and control
PCW (Process Cooling Water) System Expansion
● Design and Install new PCW for EPI tools
● PCW Capacity: 100CMH@90m (N+1)
● Mechanical works include New Pump, Cartridge Filter, HEX, Tank, CHW piping & PCW SS piping
● Electrical works include: VSD, Bornitron, wiring and power
● I&C works include temperature, conductivity, pressure… monitoring and control
● Chemical Treatment
High purity piping
● N2 Ar H2 O2 He gas piping work from Gas yard to main Fab
● Provide orbital welding for 8-inch-high purity piping installation
● Qualification for Gas line purity
Qualification for Gas line purity
● New CDA system
● Design and build CDA supply system
● Capacity: Flow rate 67m³/min, pressure 8.5kg/cm³
● System Equipment supply: compressor 3 set 4020CMH/each dryer,
● heater, exchanger, receiver tank, etc.
● Utilities include: 6.6kV, 415V electrical, Gas, CW, PCW, system control and monitoring
